- 专利标题: GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IMPEDANCE SHIFTING BY IRISES IN A POWER-SUPPLYING WAVEGUIDE
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申请号: US16459362申请日: 2019-07-01
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公开(公告)号: US20190326099A1公开(公告)日: 2019-10-24
- 发明人: Satoru Kobayashi , Hideo Sugai , Toan Tran , Soonam Park , Dmitry Lubomirsky
- 申请人: Applied Materials, Inc.
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A rotating microwave is established for any resonant mode TEmnl or TMmnl of a cavity, where the user is free to choose the values of the mode indices m, n and l. The fast rotation, the rotation frequency of which is equal to an operational microwave frequency, is accomplished by setting the temporal phase difference ΔØ and the azimuthal angle Δθ between two microwave input ports P and Q as functions of m, n and l. The slow rotation of frequency Ωa (typically 1-1000 Hz), is established by transforming dual field inputs α cos Ωat and ±α sin Ωat in the orthogonal input system into an oblique system defined by the angle Δθ between two microwave ports P and Q.
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