- 专利标题: OPTIMIZATION BASED ON MACHINE LEARNING
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申请号: US16527098申请日: 2019-07-31
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公开(公告)号: US20190354023A1公开(公告)日: 2019-11-21
- 发明人: Xiaofeng LIU
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G06N20/00 ; G06F17/50
摘要:
A method for improving a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic apparatus, the method including: obtaining a first source of the lithographic apparatus; classifying the first source into a class among a plurality of possible classes, based on one or more numerical characteristics of the first source, using a machine learning model, by a computer; determining whether the class is among one or more predetermined classes; only when the class is among the one or more predetermined classes, adjusting one or more source design variables to obtain a second source.
公开/授权文献
- US11029605B2 Optimization based on machine learning 公开/授权日:2021-06-08
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