Invention Application
- Patent Title: Laterally Vibrating Bulk Acoustic Wave Resonator
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Application No.: US16505669Application Date: 2019-07-08
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Publication No.: US20200021272A1Publication Date: 2020-01-16
- Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
- Applicant: Texas Instruments Incorporated
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/05 ; H03H9/02

Abstract:
A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
Public/Granted literature
- US11646714B2 Laterally vibrating bulk acoustic wave resonator Public/Granted day:2023-05-09
Information query
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