- 专利标题： Process of Imprinting a Substrate with Fluid Control Features
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申请号： US16045401申请日： 2018-07-25
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公开(公告)号： US20200033719A1公开(公告)日： 2020-01-30
- 发明人: Niyaz Khusnatdinov , Edward Brian Fletcher
- 申请人： CANON KABUSHIKI KAISHA
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; B29C59/02
摘要：
A process, system, and method of manufacturing an article on a substrate having a fluid control feature. The fluid control feature may include at least one depressed region formed along an edge of an imprint field. Formable material is deposited in the imprint field of the substrate. A template is moved such that the template comes into contact with the formable material in the imprint field. While the template comes into contact with the formable material, the formable material may flow into the fluid control feature.
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