- 专利标题: MICROMECHANICAL MIRROR DEVICE
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申请号: US16598636申请日: 2019-10-10
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公开(公告)号: US20200049976A1公开(公告)日: 2020-02-13
- 发明人: Thomas GRASSHOFF
- 申请人: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- 优先权: DE102017206252.5 20170411
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B7/192
摘要:
A micromechanical mirror device has: a plate-shaped mirror having a reflecting surface for reflecting light, the reflecting surface being configured to be planar; a closed frame structure supporting the plate-shaped mirror and completely framing an edge of the plate-shaped mirror; a spring arrangement having at least two spring structures arranged mirror-symmetrically and connecting the closed frame structure to a stationary support structure, the spring arrangement being configured such that the closed frame structure and the plate-shaped mirror can be brought into a resonant vibrational state with respect to the support structure; and a connecting arrangement having at least four connecting spring structures arranged mirror-symmetrically and each connecting the plate-shaped mirror to the closed frame structure; the connecting spring structures being configured to be elastically deformable and arranged such that they deform back and forth in the resonant vibrational state so that the plate-shaped mirror is partially mechanically decoupled from the closed frame structure.
公开/授权文献
- US11454803B2 Micromechanical mirror device 公开/授权日:2022-09-27
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