Invention Application
- Patent Title: BACKSIDE COUPLING WITH SUPERCONDUCTING PARTIAL TSV FOR TRANSMON QUBITS
-
Application No.: US16597604Application Date: 2019-10-09
-
Publication No.: US20200052181A1Publication Date: 2020-02-13
- Inventor: Jared Barney Hertzberg , Sami Rosenblatt , Rasit O. Topaloglu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L39/02
- IPC: H01L39/02 ; G06N10/00 ; H01L21/3205 ; H01L21/768 ; H01L23/48 ; H01L23/532 ; H01L39/22 ; H01L39/24 ; H03K19/195 ; H01L27/18

Abstract:
A capacitive coupling device (superconducting C-coupler) includes a trench formed through a substrate, from a backside of the substrate, reaching a depth in the substrate, substantially orthogonal to a plane of fabrication on a frontside of the substrate, the depth being less than a thickness of the substrate. A superconducting material is deposited as a continuous conducting via layer in the trench with a space between surfaces of the via layer in the trench remaining accessible from the backside. A superconducting pad is formed on the frontside, the superconducting pad coupling with a quantum logic circuit element fabricated on the frontside. An extension of the via layer is formed on the backside. The extension couples to a quantum readout circuit element fabricated on the backside.
Public/Granted literature
- US10804454B2 Backside coupling with superconducting partial TSV for transmon qubits Public/Granted day:2020-10-13
Information query
IPC分类: