发明申请
- 专利标题: MICROFABRICATION DEVICE, MICROFABRICATION METHOD, TRANSFER MOLD, AND TRANSFER OBJECT
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申请号: US16574477申请日: 2019-09-18
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公开(公告)号: US20200094430A1公开(公告)日: 2020-03-26
- 发明人: Kazuhiko NODA , Katsuhiro DOI , Asahiko NOGAMI , Kyoko SAKURAI
- 申请人: Dexerials Corporation
- 申请人地址: JP Tokyo
- 专利权人: Dexerials Corporation
- 当前专利权人: Dexerials Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2018-177767 20180921; JP2019-055111 20190322
- 主分类号: B26D3/10
- IPC分类号: B26D3/10 ; B23B5/48 ; B29C59/00
摘要:
A new and improved microfabrication device, microfabrication method, transfer mold, and transfer object that can suppress a defect are provided. A microfabrication device comprises a tool mounting portion, a predetermined cutting tool, an oscillator, and a controller, wherein the controller performs a cutting process to satisfy at least one of: a cutting condition (1) that oscillations at a start point and an end point of each set are in phase with each other; and a cutting condition (2) that oscillations of the sets are in phase with each other.
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