MICROFABRICATION DEVICE, MICROFABRICATION METHOD, TRANSFER MOLD, AND TRANSFER OBJECT
摘要:
A new and improved microfabrication device, microfabrication method, transfer mold, and transfer object that can suppress a defect are provided. A microfabrication device comprises a tool mounting portion, a predetermined cutting tool, an oscillator, and a controller, wherein the controller performs a cutting process to satisfy at least one of: a cutting condition (1) that oscillations at a start point and an end point of each set are in phase with each other; and a cutting condition (2) that oscillations of the sets are in phase with each other.
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