Invention Application
- Patent Title: Spatial Wafer Processing With Improved Temperature Uniformity
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Application No.: US16658393Application Date: 2019-10-21
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Publication No.: US20200131635A1Publication Date: 2020-04-30
- Inventor: Joseph AuBuchon , Sanjeev Baluja , Dhritiman Subha Kashyap , Jared Ahmad Lee , Tejas Ulavi , Michael Rice
- Applicant: Applied Materials, Inc.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/67 ; C23C16/458

Abstract:
Apparatus and methods to process one or more wafers are described. A processing chamber comprises a first processing station comprising a first gas injector having a first face, a first emissivity and a first temperature, a second processing station comprising a second gas injector having a second face, a second emissivity and a second temperature, and a substrate support assembly comprising a plurality of substantially coplanar support surfaces, the substrate support assembly configured to move the support surfaces between the first processing station and the second processing station. When a wafer is on the support surfaces, a temperature skew of less than about 0.5° C. is developed upon moving the wafer between the stations in about 0.5 seconds.
Public/Granted literature
- US10787739B2 Spatial wafer processing with improved temperature uniformity Public/Granted day:2020-09-29
Information query
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