Invention Application
- Patent Title: APPARATUS AND METHOD FOR CONTROLLING ION BEAM PROPERTIES USING ELECTROSTATIC FILTER
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Application No.: US16182220Application Date: 2018-11-06
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Publication No.: US20200144017A1Publication Date: 2020-05-07
- Inventor: Alexandre Likhanskii , Frank Sinclair , Shengwu Chang
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/317

Abstract:
An apparatus and method are provided. In one embodiment. an apparatus may include a main chamber, where the main chamber includes an electrode assembly. The electrode assembly may include a plurality of electrodes arranged between a chamber entrance and a chamber exit of the main chamber. The apparatus may include a beam tunnel, connected to the chamber entrance, configured to conduct an ion beam to the main chamber; and an electrostatic tuner, disposed in the beam tunnel, the electrostatic tuner comprising at least one tuner electrode, independently coupled to a tuner voltage assembly.
Public/Granted literature
- US10665415B1 Apparatus and method for controlling ion beam properties using electrostatic filter Public/Granted day:2020-05-26
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