- 专利标题: VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
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申请号: US16730276申请日: 2019-12-30
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公开(公告)号: US20200144288A1公开(公告)日: 2020-05-07
- 发明人: Kohji Kanamori , Young-Hwan Son , Byung-Kwan You , Eun-Taek Jung
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7ce44a26
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L21/28 ; H01L49/02 ; H01L27/1157 ; H01L29/66 ; H01L21/56 ; H01L21/764 ; H01L21/768 ; H01L23/532 ; H01L29/423
摘要:
A vertical memory device includes first, second and third impurity regions sequentially stacked in a first direction substantially perpendicular to an upper surface of a substrate, a gate electrode structure including gate electrodes spaced apart from each other in the first direction on the third impurity region, a channel extending through the gate electrode structure, the second and third impurity regions, and an upper portion of the first impurity region on the substrate in the first direction, and a charge storage structure covering a portion of an outer sidewall and a lower surface of the channel. The channel directly contacts a sidewall of the second impurity region.
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