• Patent Title: CARRIER HEAD OF POLISHING APPARATUS AND MEMBRANE USED THEREIN
  • Application No.: US16400554
    Application Date: 2019-05-01
  • Publication No.: US20200147751A1
    Publication Date: 2020-05-14
  • Inventor: JUN HO SONSung Ho SHIN
  • Applicant: KCTECH CO., LTD.
  • Applicant Address: KR Anseong-si,
  • Assignee: KCTECH CO., LTD.
  • Current Assignee: KCTECH CO., LTD.
  • Current Assignee Address: KR Anseong-si,
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3e06c61c
  • Main IPC: B24B37/30
  • IPC: B24B37/30 B24B37/04
CARRIER HEAD OF POLISHING APPARATUS AND MEMBRANE USED THEREIN
Abstract:
Provided are a membrane and carrier head using the membrane for polishing apparatus. The membrane comprises a first fixing flap extending inwards from the upper part of a side portion, a second fixing flap extending upwards from the upper part of the side portion, wherein the second fixing flap has a first inclined part, a second inclined part and a third extending part of extending upwards whereby a compensation force generated by the inclined parts realize the constant pressing force to the edge of a substrate during a polishing process.
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