Invention Application
- Patent Title: CARRIER HEAD OF POLISHING APPARATUS AND MEMBRANE USED THEREIN
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Application No.: US16400554Application Date: 2019-05-01
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Publication No.: US20200147751A1Publication Date: 2020-05-14
- Inventor: JUN HO SON , Sung Ho SHIN
- Applicant: KCTECH CO., LTD.
- Applicant Address: KR Anseong-si,
- Assignee: KCTECH CO., LTD.
- Current Assignee: KCTECH CO., LTD.
- Current Assignee Address: KR Anseong-si,
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3e06c61c
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B37/04

Abstract:
Provided are a membrane and carrier head using the membrane for polishing apparatus. The membrane comprises a first fixing flap extending inwards from the upper part of a side portion, a second fixing flap extending upwards from the upper part of the side portion, wherein the second fixing flap has a first inclined part, a second inclined part and a third extending part of extending upwards whereby a compensation force generated by the inclined parts realize the constant pressing force to the edge of a substrate during a polishing process.
Public/Granted literature
- US11597055B2 Carrier head of polishing apparatus and membrane used therein Public/Granted day:2023-03-07
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