Invention Grant
- Patent Title: Carrier head of polishing apparatus and membrane used therein
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Application No.: US16400554Application Date: 2019-05-01
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Publication No.: US11597055B2Publication Date: 2023-03-07
- Inventor: Jun Ho Son , Sung Ho Shin
- Applicant: KCTECH CO., LTD.
- Applicant Address: KR Anseong-si
- Assignee: KCTECH CO., LTD.
- Current Assignee: KCTECH CO., LTD.
- Current Assignee Address: KR Anseong-si
- Agency: Stein IP, LLC
- Priority: KR10-2018-0137685 20181109
- Main IPC: B24B37/04
- IPC: B24B37/04 ; B24B37/30 ; B24B37/32 ; B24B37/005

Abstract:
Provided are a membrane and carrier head using the membrane for polishing apparatus. The membrane comprises a first fixing flap extending inwards from the upper part of a side portion, a second fixing flap extending upwards from the upper part of the side portion, wherein the second fixing flap has a first inclined part, a second inclined part and a third extending part of extending upwards whereby a compensation force generated by the inclined parts realize the constant pressing force to the edge of a substrate during a polishing process.
Public/Granted literature
- US20200147751A1 CARRIER HEAD OF POLISHING APPARATUS AND MEMBRANE USED THEREIN Public/Granted day:2020-05-14
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