Invention Application
- Patent Title: FLUID CONTROL DEVICE
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Application No.: US16628193Application Date: 2018-07-20
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Publication No.: US20200149162A1Publication Date: 2020-05-14
- Inventor: Atsushi HIDAKA , Takatoshi NAKATANI , Keisuke NAKATSUJI , Keiji HIRAO , Yukio MINAMI , Nobukazu IKEDA
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@e7a8bad
- International Application: PCT/JP2018/027233 WO 20180720
- Main IPC: C23C16/448
- IPC: C23C16/448 ; H05B3/06 ; H05B3/12

Abstract:
In order to optimally supply a raw material by using a heater, the fluid control device (100) includes a fluid heating section (1) provided with a flow path or a fluid accommodation portion inside, and a heater (10) for heating the fluid heating section, the heater having a heating element (10a) and a metallic heat transfer member (10b) thermally connected to the heating element and arranged so as to surround the fluid heating section, and the surface of the heat transfer member facing the fluid heating section includes a surface (S1) subjected to surface treatment for improving heat dissipation.
Information query
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