公开(公告)号：US20200161147A1

公开(公告)日：2020-05-21

申请号：US16635002

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Yukio MINAMI ,  Tsutomu SHINOHARA

IPC: H01L21/67 ,  B01J4/00

Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.

公开(公告)号：US20210125839A1

公开(公告)日：2021-04-29

申请号：US16634673

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Yukio MINAMI ,  Tsutomu SHINOHARA

IPC: H01L21/67 ,  H01L21/02

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies carbon dioxide in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied carbon dioxide stored in the tank toward the processing chamber, and a damper part that is provided to a flow path communicating with a discharge side of the pump and suppresses periodic pressure fluctuations of the liquid discharged from the pump. The damper part includes a spiral tube formed into a spiral shape that is fixed at both end portions in predetermined positions, and allows the liquid discharged from the pump to flow therethrough.

公开(公告)号：US20240101446A1

公开(公告)日：2024-03-28

申请号：US18264501

申请日：2022-02-01

Applicant: FUJIKIN INCORPORATED

Inventor： Ichiro TOKUDA ,  Mizuki NAKAGAWA ,  Keiji HIRAO ,  Yukio MINAMI

IPC: C02F1/04 ,  F22B1/28 ,  F22B37/44 ,  F22D1/00 ,  H01L21/67

CPC classification number: C02F1/045 ,  F22B1/28 ,  F22B37/44 ,  F22D1/003 ,  H01L21/67017 ,  C02F2103/04

Abstract: A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.

公开(公告)号：US20210125840A1

公开(公告)日：2021-04-29

申请号：US16634681

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide YOSHIDA ,  Yukio MINAMI ,  Tsutomu SHINOHARA

IPC: H01L21/67 ,  H01L21/02

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.

公开(公告)号：US20200149162A1

公开(公告)日：2020-05-14

申请号：US16628193

申请日：2018-07-20

Applicant: FUJIKIN INCORPORATED

Inventor： Atsushi HIDAKA ,  Takatoshi NAKATANI ,  Keisuke NAKATSUJI ,  Keiji HIRAO ,  Yukio MINAMI ,  Nobukazu IKEDA

IPC: C23C16/448 ,  H05B3/06 ,  H05B3/12

Abstract: In order to optimally supply a raw material by using a heater, the fluid control device (100) includes a fluid heating section (1) provided with a flow path or a fluid accommodation portion inside, and a heater (10) for heating the fluid heating section, the heater having a heating element (10a) and a metallic heat transfer member (10b) thermally connected to the heating element and arranged so as to surround the fluid heating section, and the surface of the heat transfer member facing the fluid heating section includes a surface (S1) subjected to surface treatment for improving heat dissipation.