Invention Application
- Patent Title: APPARATUS AND METHOD FOR INSPECTING GLASS SUBSTRATE
-
Application No.: US16679919Application Date: 2019-11-11
-
Publication No.: US20200150052A1Publication Date: 2020-05-14
- Inventor: Jin Ho LEE
- Applicant: Samsung Display Co., Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@34831434
- Main IPC: G01N21/896
- IPC: G01N21/896 ; G01N21/88 ; G06T7/00

Abstract:
An apparatus and method for inspecting a glass substrate. The apparatus for inspecting a glass substrate includes a stage configured to support the glass substrate, a first light source for irradiating light onto a surface of the glass substrate at a first angle, a first camera for capturing scattered light of the light irradiated from the first light source, a second light source for irradiating light onto the surface of the glass substrate at a second angle greater than the first angle, a second camera for capturing reflected light and scattered light of the light irradiated from the second light source, and a defect detection unit for detecting a defect of the glass substrate using a first image provided by the first camera and a second image provided by the second camera.
Public/Granted literature
- US10942132B2 Apparatus and method for inspecting glass substrate Public/Granted day:2021-03-09
Information query
IPC分类: