• Patent Title: APPARATUS AND METHOD FOR INSPECTING GLASS SUBSTRATE
  • Application No.: US16679919
    Application Date: 2019-11-11
  • Publication No.: US20200150052A1
    Publication Date: 2020-05-14
  • Inventor: Jin Ho LEE
  • Applicant: Samsung Display Co., Ltd.
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@34831434
  • Main IPC: G01N21/896
  • IPC: G01N21/896 G01N21/88 G06T7/00
APPARATUS AND METHOD FOR INSPECTING GLASS SUBSTRATE
Abstract:
An apparatus and method for inspecting a glass substrate. The apparatus for inspecting a glass substrate includes a stage configured to support the glass substrate, a first light source for irradiating light onto a surface of the glass substrate at a first angle, a first camera for capturing scattered light of the light irradiated from the first light source, a second light source for irradiating light onto the surface of the glass substrate at a second angle greater than the first angle, a second camera for capturing reflected light and scattered light of the light irradiated from the second light source, and a defect detection unit for detecting a defect of the glass substrate using a first image provided by the first camera and a second image provided by the second camera.
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