Invention Application
- Patent Title: MONITORING APPARATUS OF RAW MATERIAL TANK AND MONITORING METHOD OF RAW MATERIAL TANK
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Application No.: US16695411Application Date: 2019-11-26
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Publication No.: US20200165720A1Publication Date: 2020-05-28
- Inventor: Kenta Horigome , Shinobu Kawamorita , Yosuke Matsumoto , Kosuke Takahashi , Naohide Ito
- Applicant: Tokyo Electron Limited
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@9c16336
- Main IPC: C23C14/54
- IPC: C23C14/54 ; G05B15/02 ; G05D23/19

Abstract:
A monitoring apparatus for monitoring a raw material tank monitors the temperature of the raw material tank when the temperature of the raw material tank storing a solid or liquid raw material is raised to a set temperature by a heating unit. The monitoring apparatus includes: a temperature determination unit configured to determine whether the temperature has reached a stable range including the set temperature, and determine whether the temperature has deviated from the stable range; and a setting unit configured to set the set temperature of the heating unit to 0° C. when a predetermined timeout time has elapsed from a time point at which the temperature determination unit determined that the temperature deviated from the stable range.
Public/Granted literature
- US11073851B2 Monitoring apparatus of raw material tank and monitoring method of raw material tank Public/Granted day:2021-07-27
Information query
IPC分类: