Invention Application
- Patent Title: DIFFERENTIAL SENSOR USING THIN-FILM PIEZOELECTRIC CAPACITORS
-
Application No.: US16201808Application Date: 2018-11-27
-
Publication No.: US20200168786A1Publication Date: 2020-05-28
- Inventor: Sudhanshu Khanna , Michael Zwerg , Steven C. Bartling , Brian Elies , Krishnasawamy Nagaraj , Wei-Yan Shih
- Applicant: Texas Instruments Incorporated
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/107 ; H01L41/04 ; H01L41/047

Abstract:
An improved differential sensor and corresponding apparatus implementing same. The differential sensor includes a substrate, an amplifier coupled to the substrate, and a plurality of highly-matched piezoelectric capacitors formed onto the substrate. A first set of the highly-matched piezoelectric capacitors are electrically coupled to a non-inverting input of the amplifier, and a second set of the highly-matched piezoelectric capacitors are electrically coupled to an inverting input of the amplifier to form an open loop differential amplifier.
Information query
IPC分类: