Invention Application
- Patent Title: ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFORMANCE
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Application No.: US16677491Application Date: 2019-11-07
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Publication No.: US20200176296A1Publication Date: 2020-06-04
- Inventor: Abdul Aziz KHAJA , Venkata Sharat Chandra PARIMI , Sarah Michelle BOBEK , Prashant Kumar KULSHRESHTHA , Vinay K. PRABHAKAR
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32

Abstract:
Aspects of the present disclosure relate to one or more implementations of a substrate support for a processing chamber. In one implementation, a substrate support includes a body having a center, and a support surface on the body configured to at least partially support a substrate. The substrate support includes a first angled wall that extends upward and radially outward from the support surface, and a first upper surface disposed above the support surface. The substrate support also includes a second angled wall that extends upward and radially outward from the first upper surface, the first upper surface extending between the first angled wall and the second angled wall. The substrate support also includes a second upper surface extending from the second angled wall. The second upper surface is disposed above the first upper surface.
Public/Granted literature
- US11682574B2 Electrostatic chuck design with improved chucking and arcing performance Public/Granted day:2023-06-20
Information query
IPC分类: