Invention Application
- Patent Title: FLIPPED VERTICAL FIELD-EFFECT-TRANSISTOR
-
Application No.: US16781183Application Date: 2020-02-04
-
Publication No.: US20200176335A1Publication Date: 2020-06-04
- Inventor: Kangguo CHENG , Xin MIAO , Wenyu XU , Chen ZHANG
- Applicant: International Business Machines Corporation
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L27/092 ; H01L29/78 ; H01L29/66 ; H01L21/768 ; H01L23/535 ; H01L29/786 ; H01L21/683 ; H01L21/84 ; H01L23/50 ; H01L23/528 ; H01L27/12 ; H01L21/8238

Abstract:
Various embodiments disclose a method for fabricating vertical transistors. In one embodiment, a structure is formed comprising at least a first substrate, an insulator layer on the substrate, a first doped layer on the insulator layer, at least one fin structure in contact with the doped layer, a dielectric layer surrounding a portion of the fin structure, a gate layer on the dielectric layer, a second doped layer in contact with the fin structure, a first contact area in contact with the second doped layer, and at least a first interconnect in contact with the first contact area. The structure is flipped bonded to a second substrate. The first substrate and the insulator layer are removed to expose the first doped layer. A second contact area is formed in contact with the first doped layer. At least a second interconnect is formed in contact with the second contact area.
Public/Granted literature
- US11062965B2 Flipped vertical field-effect-transistor Public/Granted day:2021-07-13
Information query
IPC分类: