Invention Application
- Patent Title: HIGH VOLTAGE VACUUM FEEDTHROUGH
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Application No.: US16703729Application Date: 2019-12-04
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Publication No.: US20200185183A1Publication Date: 2020-06-11
- Inventor: Ronald VAN DER WILK
- Applicant: ASML Netherlands B.V.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@38f9dfcb
- Main IPC: H01J5/46
- IPC: H01J5/46 ; H01J5/36 ; C03C27/04 ; H01J9/28

Abstract:
A feedthrough for providing an electrical connection is provided. The feedthrough comprises a conductor and a quartz or a glass structure configured to surround at least a portion of the conductor and provide isolation to the conductor. The conductor and the quartz or glass structure may be coaxially arranged. The feedthrough can provide an electrical connection between an inside and outside of a vacuum chamber that contains a sample.
Public/Granted literature
- US10886093B2 High voltage vacuum feedthrough Public/Granted day:2021-01-05
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