发明申请
- 专利标题: SEMICONDUCTOR INDUCTORS
-
申请号: US16617548申请日: 2017-06-30
-
公开(公告)号: US20200185490A1公开(公告)日: 2020-06-11
- 发明人: Georg Seidemann , Bernd WAIDHAS , Thomas WAGNER , Andreas WOLTER , Andreas AUGUSTIN
- 申请人: INTEL IP CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL IP CORPORATION
- 当前专利权人: INTEL IP CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 国际申请: PCT/US17/40381 WO 20170630
- 主分类号: H01L49/02
- IPC分类号: H01L49/02 ; H01L23/64 ; H01L23/00 ; H01L21/02 ; H01L21/56 ; H01F17/04
摘要:
The present disclosure is directed to systems and methods for fabricating a semiconductor inductor that includes a coil deposited on a stop layer that is deposited on a sacrificial substrate. The semiconductor inductor may be fabricated on a silicon wafer and singulated. The sacrificial substrate beneficially provides structural support for the singulated semiconductor inductor. The singulated semiconductor inductor advantageously requires minimal active die surface area. The removal of the sacrificial substrate after coupling to the active die beneficially reduces the overall thickness (or height) of the semiconductor package, providing a decided advantage in low profile, portable, electronic devices.
公开/授权文献
- US11127813B2 Semiconductor inductors 公开/授权日:2021-09-21
信息查询
IPC分类: