• Patent Title: LATCHING MECHANISM FOR A SUBSTRATE CONTAINER
  • Application No.: US16095863
    Application Date: 2017-05-26
  • Publication No.: US20200211877A1
    Publication Date: 2020-07-02
  • Inventor: Russ V. RaschkeJason Steffens
  • Applicant: ENTEGRIS, Inc.
  • International Application: PCT/US2017/034609 WO 20170526
  • Main IPC: H01L21/673
  • IPC: H01L21/673
LATCHING MECHANISM FOR A SUBSTRATE CONTAINER
Abstract:
A substrate container that utilizes a rocker linkage or a linear cam arrangement in latch mechanism that is actuated by a rotary cam. The rocker linkage or linear cam is mounted to an interior panel of a door of the substrate container and may be disposed proximate an edge portion of the interior panel. The rocker linkage or linear cam may be configured to exert an axial force component on a housing of the substrate container to seat the door against a seal member. The rocker linkage or linear cam also transfers the axial latching forces to the door to reduce transfer of forces to the cam. The rocker linkage or linear cam may be arranged to transfer axial forces in a radially outward direction when the latch mechanism is engaged, to prevent push back on the rotary cam.
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