公开(公告)号：US20200211877A1

公开(公告)日：2020-07-02

申请号：US16095863

申请日：2017-05-26

Applicant: ENTEGRIS, Inc.

Inventor： Russ V. Raschke ,  Jason Steffens

IPC: H01L21/673

Abstract: A substrate container that utilizes a rocker linkage or a linear cam arrangement in latch mechanism that is actuated by a rotary cam. The rocker linkage or linear cam is mounted to an interior panel of a door of the substrate container and may be disposed proximate an edge portion of the interior panel. The rocker linkage or linear cam may be configured to exert an axial force component on a housing of the substrate container to seat the door against a seal member. The rocker linkage or linear cam also transfers the axial latching forces to the door to reduce transfer of forces to the cam. The rocker linkage or linear cam may be arranged to transfer axial forces in a radially outward direction when the latch mechanism is engaged, to prevent push back on the rotary cam.

公开(公告)号：US11211274B2

公开(公告)日：2021-12-28

申请号：US16095863

申请日：2017-05-26

Applicant: ENTEGRIS, Inc.

Inventor： Russ V. Raschke ,  Jason Steffens

IPC: H01L21/673

Abstract: A substrate container that utilizes a rocker linkage or a linear cam arrangement in latch mechanism that is actuated by a rotary cam. The rocker linkage or linear cam is mounted to an interior panel of a door of the substrate container and may be disposed proximate an edge portion of the interior panel. The rocker linkage or linear cam may be configured to exert an axial force component on a housing of the substrate container to seat the door against a seal member. The rocker linkage or linear cam also transfers the axial latching forces to the door to reduce transfer of forces to the cam. The rocker linkage or linear cam may be arranged to transfer axial forces in a radially outward direction when the latch mechanism is engaged, to prevent push back on the rotary cam.