- 专利标题: TEMPORARY ADHESIVE CONTAINING PHENYL GROUP-CONTAINING POLYSILOXANE
-
申请号: US16627993申请日: 2018-07-05
-
公开(公告)号: US20200216731A1公开(公告)日: 2020-07-09
- 发明人: Shunsuke MORIYA , Tomoyuki ENOMOTO , Tetsuya SHINJO , Hiroshi OGINO , Kazuhiro SAWADA
- 申请人: NISSAN CHEMICAL CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7804e6a6
- 国际申请: PCT/JP2018/025542 WO 20180705
- 主分类号: C09J183/04
- IPC分类号: C09J183/04 ; H01L21/304 ; H01L21/683 ; C08G77/00 ; C09J5/06
摘要:
An adhesive for separatably attaching a support to a circuit side of a wafer to process a rear surface of the wafer, the adhesive including a component (A) that is cured by a hydrosilylation reaction and a component (B) containing a phenyl group-containing polyorganosiloxane, wherein a ratio in % by mass of the component (A) to the component (B) is 95:5 to 30:70. A separation method including applying the adhesive onto a first body to form an adhesion layer, attaching a second body to the adhesion layer, heating the adhesion layer from a side of the first body to cure the adhesive to form a layered body, processing the layered body, and carrying out separation between the adhesion layer, and the first and second bodies. The processing may be polishing the rear surface of the wafer.
公开/授权文献
信息查询
IPC分类: