发明申请
- 专利标题: FRONT END SYSTEM HAVING AN ACOUSTIC WAVE RESONATOR (AWR) ON AN INTERPOSER SUBSTRATE
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申请号: US16647451申请日: 2017-12-28
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公开(公告)号: US20200219861A1公开(公告)日: 2020-07-09
- 发明人: Telesphor KAMGAING , Vijay K. NAIR , Feras EID , Georgios C. DOGIAMIS , Johanna M. SWAN , Stephan LEUSCHNER
- 申请人: Intel Corporation
- 国际申请: PCT/US2017/068754 WO 20171228
- 主分类号: H01L25/16
- IPC分类号: H01L25/16 ; H01L23/498 ; H01L23/24 ; H03H9/17 ; H03H9/05
摘要:
RF front end systems or modules with an acoustic wave resonator (AWR) on an interposer substrate are described. In an example, an integrated system includes an active die, the active die comprising a semiconductor substrate having a plurality of active circuits therein. An interposer is also included, the interposer comprising an acoustic wave resonator (AWR). A seal frame couples the active die to the interposer, the seal frame surrounding the acoustic wave resonator and hermetically sealing the acoustic wave resonator between the active die and the interposer.
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