- 专利标题: POLISHING PAD AND METHOD FOR MANUFACTURING SAME
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申请号: US16650597申请日: 2018-10-12
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公开(公告)号: US20200230780A1公开(公告)日: 2020-07-23
- 发明人: Hirohito MIYASAKA , Teppei TATENO , Ryuma MATSUOKA , Hiroshi KURIHARA , Takumi MIKUNI
- 申请人: Fujibo Holdings, Inc.
- 申请人地址: JP Chuo-ku, Tokyo
- 专利权人: Fujibo Holdings, Inc.
- 当前专利权人: Fujibo Holdings, Inc.
- 当前专利权人地址: JP Chuo-ku, Tokyo
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@264d229b
- 国际申请: PCT/JP2018/038099 WO 20181012
- 主分类号: B24B37/24
- IPC分类号: B24B37/24 ; H01L21/304 ; B24B37/26 ; B24D3/28
摘要:
A polishing pad includes: a polishing layer having a polyurethane sheet containing substantially spherical cells, wherein E′(90%)/E′(30%) falls within a range of 0.4 to 0.7, where E′(90%) represents a storage modulus of the polyurethane sheet that has been exposed to an environment with a temperature of 23° C. and a relative humidity of 90%, as measured in a tension mode at 40° C. with an initial load of 148 g, a strain range of 0.1%, and a measurement frequency of 1.6 Hz, and E′(30%) represents a storage modulus of the polyurethane sheet that has been exposed to an environment with a temperature of 23° C. and a relative humidity of 30%, as measured in a tension mode at 40° C. with an initial load of 148 g, a strain range of 0.1%, and a measurement frequency of 1.6 Hz. Also provided is a method for manufacturing the polishing pad.
公开/授权文献
- US11654526B2 Polishing pad and method for manufacturing same 公开/授权日:2023-05-23
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