- 专利标题: TAILORING HOLES CARRIER CONCENTRATION IN CuXCrYO2
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申请号: US16651543申请日: 2018-09-27
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公开(公告)号: US20200266058A1公开(公告)日: 2020-08-20
- 发明人: Damien LENOBLE
- 申请人: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@227c0c1
- 国际申请: PCT/EP2018/076349 WO 20180927
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; C04B35/12 ; H01L29/24
摘要:
The first object of the invention is directed to a method for modulating the number of charge carriers p in CuxCryO2, the method comprising the steps of (a) depositing a film of CuxCryO2 on a substrate; and (b) annealing at a temperature T the film of deposited CuxCryO2, wherein the subscripts x and y are positive numbers whose the sum is equal or inferior to 2. The method is remarkable in that the log (p)=α T2+β T+γ, wherein the temperature T is expressed degree Celsius, wherein α is a first parameter ranging from −0.00011 to −0.009, wherein β is a second parameter ranging from +0.12 to +0.14, and wherein γ is a third parameter ranging from −27.40 to −22.42. The second object of the invention is directed to a semiconductor comprising CuxCryO2 deposited on a substrate and obtainable by the method in accordance with the first object of the invention.
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