• Patent Title: VACUUM PUMP, AND BLADE COMPONENT, ROTOR, AND STATIONARY BLADE USED THEREIN
  • Application No.: US16495009
    Application Date: 2018-03-19
  • Publication No.: US20200271132A1
    Publication Date: 2020-08-27
  • Inventor: Manabu NonakaHideki Enosawa
  • Applicant: Edwards Japan Limited
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3c4aa29e com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@69ca71e0 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@ab0ac39
  • International Application: PCT/JP2018/010835 WO 20180319
  • Main IPC: F04D29/70
  • IPC: F04D29/70 F04D19/04
VACUUM PUMP, AND BLADE COMPONENT, ROTOR, AND STATIONARY BLADE USED THEREIN
Abstract:
A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.
Information query
Patent Agency Ranking
0/0