-
公开(公告)号：US20220163041A1
公开(公告)日：2022-05-26
申请号：US17436880
申请日：2020-03-09
发明人： Hideki Enosawa , Manabu Nonaka , Takashi Kabasawa
摘要： A deposited material sensor is arranged, in a flow path of a gas from an inlet port to an outlet port, on an upstream side or a downstream side of a predetermined flow path position where a cause of disruption to operation of the vacuum pump is to occur. In addition, the deposited material sensor detects a presence or absence of deposited material at the arrangement position of the deposited material sensor, and the arrangement position of the deposited material sensor is a position where a thickness of the deposited material at the predetermined flow path position assumes a predetermined thickness that corresponds to a maintenance time of maintenance for suppressing the cause when a detection state of the deposited material sensor changes from deposited material absent to deposited material present.
-
公开(公告)号：US20220163053A1
公开(公告)日：2022-05-26
申请号：US17436426
申请日：2020-03-09
摘要： A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.
-
公开(公告)号：US11898567B2
公开(公告)日：2024-02-13
申请号：US17436880
申请日：2020-03-09
发明人： Hideki Enosawa , Manabu Nonaka , Takashi Kabasawa
CPC分类号： F04D27/001 , F04D19/042
摘要： A deposited material sensor is arranged, in a flow path of a gas from an inlet port to an outlet port, on an upstream side or a downstream side of a predetermined flow path position where a cause of disruption to operation of the vacuum pump is to occur. In addition, the deposited material sensor detects a presence or absence of deposited material at the arrangement position of the deposited material sensor, and the arrangement position of the deposited material sensor is a position where a thickness of the deposited material at the predetermined flow path position assumes a predetermined thickness that corresponds to a maintenance time of maintenance for suppressing the cause when a detection state of the deposited material sensor changes from deposited material absent to deposited material present.
-
公开(公告)号：US11655830B2
公开(公告)日：2023-05-23
申请号：US16495009
申请日：2018-03-19
发明人： Manabu Nonaka , Hideki Enosawa
CPC分类号： F04D29/701 , F04D19/04 , F04D19/042 , F04D29/324 , F05B2240/30
摘要： A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.
-
公开(公告)号：US12044251B2
公开(公告)日：2024-07-23
申请号：US17436426
申请日：2020-03-09
CPC分类号： F04D29/666 , F04D19/042 , F04D29/388 , F04D29/644 , F04D29/662
摘要： A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.
-
公开(公告)号：US20200271132A1
公开(公告)日：2020-08-27
申请号：US16495009
申请日：2018-03-19
发明人： Manabu Nonaka , Hideki Enosawa
摘要： A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.015 秒)
