- 专利标题： Methods of Generating Drop Patterns, Systems for Shaping Films with the Drop Pattern, and Methods of Manufacturing an Article with the Drop Pattern
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申请号： US16353433申请日： 2019-03-14
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公开(公告)号： US20200292934A1公开(公告)日： 2020-09-17
- 发明人: Logan L. Simpson , Steven Wayne Burns , Jason Battin , Niyaz Khusnatdinov , Christopher Ellis Jones , Craig William Cone , Wei Zhang , James W. Irving
- 申请人： CANON KABUSHIKI KAISHA
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; B29C59/02 ; B29C35/08
摘要：
One embodiment is a method that includes generating drop pattern information. The method may comprise receiving pattern information. The pattern information may include one or both of: a substrate pattern of a representative substrate; and a template pattern of a representative template. The method may further comprise receiving offset information about a particular substrate that is representative of a measured state of the particular substrate relative to a reference state. The drop pattern information may represent a plurality of positions to place droplets of formable material on the particular substrate. The method may further comprise outputting the drop pattern information that is representative of the formable material that fills a volume between the template and the particular substrate that is in the measured state and the formable material does not spread into a border region at an edge of the particular substrate.
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