- 专利标题: BONDING WIRE FOR SEMICONDUCTOR DEVICE
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申请号: US16958633申请日: 2017-12-28
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公开(公告)号: US20200373226A1公开(公告)日: 2020-11-26
- 发明人: Daizo ODA , Takashi YAMADA , Motoki ETO , Taruo HAIBARA , Tomohiro UNO
- 申请人: NIPPON MICROMETAL CORPORATION , NIPPON STEEL Chemical & Material Co., Ltd.
- 国际申请: PCT/JP2017/047331 WO 20171228
- 主分类号: H01L23/49
- IPC分类号: H01L23/49 ; H01L23/29 ; H01L23/00
摘要:
Provided is a Pd coated Cu bonding wire for a semiconductor device capable of sufficiently obtaining bonding reliability of a ball bonded portion in a high temperature environment of 175° C. or more, even when the content of sulfur in the mold resin used in the semiconductor device package increases.The bonding wire for a semiconductor device comprises a Cu alloy core material; and a Pd coating layer formed on a surface of the Cu alloy core material; and contains 0.03 to 2% by mass in total of one or more elements selected from Ni, Rh, Ir and Pd in the bonding wire and further 0.002 to 3% by mass in total of one or more elements selected from Li, Sb, Fe, Cr, Co, Zn, Ca, Mg, Pt, Sc and Y. The bonding wire can be sufficiently obtained bonding reliability of a ball bonded portion in a high temperature environment of 175° C. or more, even when the content of sulfur in the mold resin used in the semiconductor device package increases by being used.
公开/授权文献
- US11373934B2 Bonding wire for semiconductor device 公开/授权日:2022-06-28
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