Invention Application
- Patent Title: Integrated Circuitry, Arrays Of Capacitors Of Integrated Circuitry, And Methods Used In The Fabrication Of Integrated Circuitry
-
Application No.: US16503178Application Date: 2019-07-03
-
Publication No.: US20210005619A1Publication Date: 2021-01-07
- Inventor: Kamal Kumar Muthukrishnan , Alex J. Schrinsky
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L27/11502
- IPC: H01L27/11502 ; G11C11/22 ; H01L29/51 ; H01L27/108
Abstract:
Integrated circuitry comprises a plurality of features horizontally arrayed in a two-dimensional (2D) lattice. The 2D lattice comprises a parallelogram unit cell having four lattice points and four straight-line sides between pairs of the four lattice points. The parallelogram unit cell has a straight-line diagonal there-across between two diagonally-opposed of the four lattice points. The straight-line diagonal is longer than each of the four straight-line sides. Individual of the features are at one of the four lattice points and occupy a maximum horizontal area that is horizontally elongated along a direction that is horizontally angled relative to each of the four straight-line sides. Other embodiments, including methods, are disclosed
Public/Granted literature
Information query
IPC分类:
