- 专利标题: STORAGE MEMORY DEVICE
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申请号: US16676669申请日: 2019-11-07
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公开(公告)号: US20210005733A1公开(公告)日: 2021-01-07
- 发明人: Chun-Hu CHENG
- 申请人: National Taiwan Normal University
- 申请人地址: TW Taipei City
- 专利权人: National Taiwan Normal University
- 当前专利权人: National Taiwan Normal University
- 当前专利权人地址: TW Taipei City
- 优先权: TW108123213 20190702,TW108123214 20190702
- 主分类号: H01L29/51
- IPC分类号: H01L29/51 ; H01L29/423 ; H01L29/78 ; H01L27/11597
摘要:
A storage memory device includes a vertical field effect transistor including a semiconductor substrate; a pillar extending upwardly from the substrate and containing a source, a drain, and a channel disposed therebetween; a first insulating layer surrounding the channel; a stacked structure surrounding the first insulating layer; and a gate unit. The stacked structure includes a charge trapping layer and a composite element. The composite element includes a ferroelectric layer made of a doped hafnium oxide-based material that has a predominantly orthorhombic phase and exhibits a negative capacitance; and an antiferroelectric layer made of a zirconium oxide-based material that has a predominantly tetragonal phase.
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