- 专利标题： Acid-Labile, Crosslinked Polymers, Compositions and Methods of Their Use
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申请号： US16506751申请日： 2019-07-09
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公开(公告)号： US20210009723A1公开(公告)日： 2021-01-14
- 发明人: Daniel J. Nawrocki , Jenna Cordero , Kristina Markt
- 申请人： Daniel J. Nawrocki , Jenna Cordero , Kristina Markt
- 申请人地址： US MA Chicopee; US MA Marlborough; US MA N. Grafton
- 专利权人： Daniel J. Nawrocki,Jenna Cordero,Kristina Markt
- 当前专利权人： Daniel J. Nawrocki,Jenna Cordero,Kristina Markt
- 当前专利权人地址： US MA Chicopee; US MA Marlborough; US MA N. Grafton
- 主分类号： C08F12/24
- IPC分类号： C08F12/24 ; G03F7/039 ; G03F7/038 ; G03F7/16 ; G03F7/20 ; G03F7/38 ; G03F7/32 ; G03F7/40
摘要：
The invention relates to acid-labile, crosslinked polymers. More specifically, the invention relates to acid-labile, crosslinked polymers useful in photosensitive compositions as well as method of their use in photoresist applications
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