Invention Application
- Patent Title: NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US16818294Application Date: 2020-03-13
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Publication No.: US20210036009A1Publication Date: 2021-02-04
- Inventor: Young-Jin JUNG , Bong Tae PARK , Ho Jun SEONG
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2019-0093632 20190801
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11573 ; H01L23/528 ; H01L27/11575 ; H01L23/522 ; H01L27/11565

Abstract:
A nonvolatile memory device with improved operation performance and reliability, and a method for fabricating the same are provided. The nonvolatile memory device includes a substrate, a peripheral circuit structure on the substrate, a mold structure including a plurality of insulating patterns and a plurality of gate electrodes stacked alternately on the peripheral circuit structure, a channel structure penetrating the mold structure, a first impurity pattern in contact with first portions of the channel structure and having a first conductivity type, on the mold structure, and a second impurity pattern in contact with second portions of the channel structure and having a second conductivity type different from the first conductivity type, on the mold structure.
Public/Granted literature
- US11081499B2 Nonvolatile memory device and method for fabricating the same Public/Granted day:2021-08-03
Information query
IPC分类: