Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
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Application No.: US17070012Application Date: 2020-10-14
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Publication No.: US20210050257A1Publication Date: 2021-02-18
- Inventor: Daeho YOON , Daeseon JEON , Jaeyoung CHOI
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2017-0164435 20171201
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L27/02 ; H01L23/528 ; G06F30/394 ; G06F30/398

Abstract:
Disclosed are semiconductor devices and methods of manufacturing the same. The method comprises providing a layout comprising a first group that includes first and second patterns and a second group that includes third and fourth patterns, examining a bridge risk region in the layout, biasing one end of at least one of the first and third patterns, and forming first to fourth conductive patterns by respectively using the first to fourth patterns of the layout. The one end of at least one of the first and third patterns are adjacent to the bridge risk region.
Public/Granted literature
- US11387144B2 Semiconductor device and method of manufacturing the same Public/Granted day:2022-07-12
Information query
IPC分类: