A first optical waveguide is formed on a semiconductor substrate in such a way that the first optical waveguide is surrounded by clad layers. An outside portion of the first optical waveguide is formed as a terminator, which includes a taper portion and a bending structure portion. The taper portion has a width, which is gradually reduced in a direction to a forward end of the first optical waveguide. The taper portion coverts a light confinement condition from a strong condition to a weak condition in the direction to the forward end of the first optical waveguide. The bending structure portion has an arc shape extending from an outside end of the taper portion on a plane parallel to a surface of the semiconductor substrate.