Invention Application
- Patent Title: Wind Speed Sensor Based on a Flexible Inductor and a Silicon-Based Inductor
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Application No.: US17054133Application Date: 2019-11-26
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Publication No.: US20210123940A1Publication Date: 2021-04-29
- Inventor: Zhenxiang YI , Yu WANG , Wenjun DENG , Lifeng WANG , Ming QIN , Qingan HUANG
- Applicant: SOUTHEAST UNIVERSITY
- Applicant Address: CN Nanjing
- Assignee: SOUTHEAST UNIVERSITY
- Current Assignee: SOUTHEAST UNIVERSITY
- Current Assignee Address: CN Nanjing
- Priority: CN201811423034.6 20181127
- International Application: PCT/CN2019/108032 WO 20191126
- Main IPC: G01P5/08
- IPC: G01P5/08

Abstract:
Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.
Public/Granted literature
- US11585825B2 Wind speed sensor based on a flexible inductor and a silicon-based inductor Public/Granted day:2023-02-21
Information query
IPC分类: