公开(公告)号：US20210123940A1

公开(公告)日：2021-04-29

申请号：US17054133

申请日：2019-11-26

Applicant: SOUTHEAST UNIVERSITY

Inventor： Zhenxiang YI ,  Yu WANG ,  Wenjun DENG ,  Lifeng WANG ,  Ming QIN ,  Qingan HUANG

IPC: G01P5/08

Abstract: Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.