发明申请
- 专利标题： SUBSTRATE MOUNT
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申请号： US16638742申请日： 2018-08-15
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公开(公告)号： US20210134566A1公开(公告)日： 2021-05-06
- 发明人: Reynaldo CORPUZ CO , Grant Sales VILLAVICENCIO , Ebrahim GHANBARI
- 申请人： Semblant Limited
- 申请人地址： GB London
- 专利权人： Semblant Limited
- 当前专利权人： Semblant Limited
- 当前专利权人地址： GB London
- 优先权： GB1713202.8 20170817
- 国际申请： PCT/GB2018/052317 WO 20180815
- 主分类号： H01J37/32
- IPC分类号： H01J37/32
摘要：
A substrate mount for a plasma processing apparatus comprising: a frame; an aperture within the frame, configured to accommodate an insert, the insert being configured to support a substrate for processing by the plasma processing apparatus; a releasable securing mechanism configured to releasably secure the insert within the aperture such that the insert can be replaced.
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