Invention Application
- Patent Title: CYCLONE COLLECTOR
-
Application No.: US16618348Application Date: 2018-01-29
-
Publication No.: US20210187519A1Publication Date: 2021-06-24
- Inventor: Akitake TAMURA
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-ku, Tokyo
- Priority: JP2017-108770 20170531
- International Application: PCT/JP2018/002617 WO 20180129
- Main IPC: B04C9/00
- IPC: B04C9/00 ; B01D45/14 ; B01D45/16 ; B04C5/04 ; B01D47/00 ; G01N1/22

Abstract:
There is provided a cyclone collector which can securely collect particles from an intake gas and can prevent discharge of a water mist. The cyclone collector 12 includes a container 21, a liquid-film forming section 23 for forming a liquid film 40 in the container 21, a gas inlet 33 provided in a lid 32, and an exhaust pipe 24b. The gas inlet 33 extends downward at an angle with an orthogonal plane 21B perpendicular to the axis 21A of the container 21. The opening 33a of the gas inlet 33 opens in an area at a distance from the liquid film 40. An intake gas is ejected from the gas inlet 33 toward the liquid film 40.
Public/Granted literature
- US11117144B2 Cyclone collector Public/Granted day:2021-09-14
Information query