- 专利标题: METHOD FOR AUTOMATICALLY REPLACING HIGH-PRESSURE GAS BARRELS
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申请号: US16771079申请日: 2018-12-19
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公开(公告)号: US20210190269A1公开(公告)日: 2021-06-24
- 发明人: Won Ho CHOI
- 申请人: AMT CO., LTD.
- 申请人地址: KR Asan-si, Chungcheongnam-do
- 专利权人: AMT CO., LTD.
- 当前专利权人: AMT CO., LTD.
- 当前专利权人地址: KR Asan-si, Chungcheongnam-do
- 优先权: KR10-2017-0174740 20171219,KR10-2018-0164682 20181219
- 国际申请: PCT/KR2018/016222 WO 20181219
- 主分类号: F17C13/04
- IPC分类号: F17C13/04 ; F17C13/08
摘要:
Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.
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