• 专利标题: METHOD FOR AUTOMATICALLY REPLACING HIGH-PRESSURE GAS BARRELS
  • 申请号: US16771079
    申请日: 2018-12-19
  • 公开(公告)号: US20210190269A1
    公开(公告)日: 2021-06-24
  • 发明人: Won Ho CHOI
  • 申请人: AMT CO., LTD.
  • 申请人地址: KR Asan-si, Chungcheongnam-do
  • 专利权人: AMT CO., LTD.
  • 当前专利权人: AMT CO., LTD.
  • 当前专利权人地址: KR Asan-si, Chungcheongnam-do
  • 优先权: KR10-2017-0174740 20171219,KR10-2018-0164682 20181219
  • 国际申请: PCT/KR2018/016222 WO 20181219
  • 主分类号: F17C13/04
  • IPC分类号: F17C13/04 F17C13/08
METHOD FOR AUTOMATICALLY REPLACING HIGH-PRESSURE GAS BARRELS
摘要:
Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.
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