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公开(公告)号：US20210222834A1
公开(公告)日：2021-07-22
申请号：US16652257
申请日：2018-11-14
申请人： AMT CO., LTD.
发明人： Won Ho CHOI , Chan Woo KIM
摘要： Disclosed is system for automatically replacing a high-pressure gas tank, including: a high-pressure gas tank lift installed in a cabinet which is able to be elevated and including a die to load a high-pressure gas tank thereon; a high-pressure gas tank clamp clamping the high-pressure gas tank loaded on the die of the high-pressure gas tank lift to align the position of the high-pressure gas tank; a high-pressure gas tank connection unit removing an end cap from the high-pressure gas tank elevated by the high-pressure gas tank lift to automatically connect a connector holder to a gas injection nozzle and control the flow of gas; and control unit installed in the cabinet to control operation of the high-pressure gas tank connection unit, the high-pressure gas tank lift, and the high-pressure gas tank clamp.
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公开(公告)号：US20210080061A1
公开(公告)日：2021-03-18
申请号：US16772392
申请日：2018-12-13
申请人： AMT CO., LTD.
发明人： Won Ho CHOI
摘要： Disclosed is a high-pressure gas cylinder automatic replacement device, including: a holder fixedly provided on a main plate to be positioned at one side of a connector holder of a high-pressure gas cylinder connection unit; a movable member rotatably provided at the holder; a two-stage actuator provided at the holder such that rods thereof are respectively connected to the movable member and a bracket fixed to the main plate; a docking actuator enabling the movable member to move from the holder towards the connector holder side or vice versa; a gasket removal cartridge provided at the movable member to automatically remove used gaskets from the connector holder and to accommodate the same in turn; and a gasket insertion cartridge provided at the movable member positioned at the upper portion of the gasket removal cartridge to insert a new gasket accommodated therein into the connector holder.
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公开(公告)号：US20220090740A1
公开(公告)日：2022-03-24
申请号：US17536903
申请日：2021-11-29
申请人： AMT CO., LTD.
发明人： Du Chul KIM , Jong Seong LEE , Won Ho CHOI
摘要： A method for automatically opening or closing a gas barrel valve, includes: loading and aligning a gas barrel in a cabinet; separating an end cap from the gas barrel; screw-coupling a connector holder to a gas spray nozzle, from which the ends cap has been removed; winding a spring around a first shaft by enabling forward rotation of the first shaft while suppressing reverse rotation of the first shaft, which is installed in a valve handle holder so as to idle; opening a valve by enabling reverse rotation of a valve handle of the gas barrel while preventing forward rotation of the valve handle holder; and automatically closing the valve at the time of replacement of the gas barrel or when a gas leak is detected.
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公开(公告)号：US20210190269A1
公开(公告)日：2021-06-24
申请号：US16771079
申请日：2018-12-19
申请人： AMT CO., LTD.
发明人： Won Ho CHOI
摘要： Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.
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公开(公告)号：US20210190268A1
公开(公告)日：2021-06-24
申请号：US16769405
申请日：2018-12-10
申请人： AMT CO., LTD.
发明人： Won Ho CHOI , Chan Woo KIM
摘要： Disclosed is an automatic alignment method of a high-pressure gas container in which a high-pressure gas container is loaded on a lift of a cabinet so as to supply a gas from a fabrication (FAB) process facility of a semiconductor to a wafer production line, and then, the high-pressure gas container loaded on the lift is raised, and an end cap of the high-pressure gas container and the center of a connector holder of a gas pipe are automatically aligned.
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公开(公告)号：US20210156520A1
公开(公告)日：2021-05-27
申请号：US16633422
申请日：2018-08-02
申请人： AMT CO., LTD.
发明人： Du Chul KIM , Jong Seong LEE , Won Ho CHOI
摘要： Disclosed is a device for automatically opening or closing a gas barrel valve. The device includes: a main plate installed so as to move up and down and to align the position of a gas barrel loaded in a cabinet; a gas barrel connecting portion installed on the lower portion of the main plate, separating an end cap from the gas barrel and storing the end cap, and then automatically screw-coupling a connector holder to a gas spray nozzle; a valve handle unit installed on the main plate so as to rotate around a first shaft and rotating a valve handle of the gas barrel such that the valve handle is locked or unlocked, while encompassing the valve handle of the gas barrel; and a valve handle opening or closing unit installed on the upper portion of the main plate so as to operate the valve handle unit in a direction, in which a valve of the gas barrel is opened.
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