- 专利标题: A SINGLE STEP LITHOGRAPHY COLOUR FILTER
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申请号: US17251064申请日: 2019-06-13
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公开(公告)号: US20210255543A1公开(公告)日: 2021-08-19
- 发明人: Calum Williams , George Gordon , Timothy Wilkinson , Sarah Bohndiek
- 申请人: Cambridge Enterprise Limited
- 申请人地址: GB Cambridgeshire
- 专利权人: Cambridge Enterprise Limited
- 当前专利权人: Cambridge Enterprise Limited
- 当前专利权人地址: GB Cambridgeshire
- 优先权: GB1809748.5 20180614
- 国际申请: PCT/GB2019/051645 WO 20190613
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G02B5/26
摘要:
A method is provided of producing an optical filter. The method comprises depositing a first mirror layer onto a substrate; depositing an insulating layer on the first mirror; exposing at least some of a plurality of portions of a surface of the insulating layer to a dose of energy; developing the insulating layer in order to remove a volume from the at least some of the plurality of portions of the insulating layer, wherein the volume of the insulating layer removed from each portion is related to the dose of energy exposed to each portion, and wherein a remaining thickness after the removal of the volume from each portion of the insulating layer is related to the dose of energy exposed to each portion. The method further comprises depositing a second mirror layer on the remaining thickness of each of the plurality of portions of the insulating layer.
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