- 专利标题: ENCLOSURE SYSTEM SHELF
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申请号: US17206036申请日: 2021-03-18
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公开(公告)号: US20210296149A1公开(公告)日: 2021-09-23
- 发明人: Aaron Green , Nicholas Michael Bergantz , John C. Menk
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L21/673
- IPC分类号: H01L21/673
摘要:
A set of one or more shelves is configured to be disposed within an enclosure system of a substrate processing system. The set of one or more shelves includes first upper surfaces disposed substantially in a first plane, carrier alignment features configured to align a carrier on the first upper surfaces, second upper surfaces disposed substantially in a second plane that is above the first plane, and process kit ring alignment features configured to align a process kit ring on the carrier above the second upper surfaces.
公开/授权文献
- US12027397B2 Enclosure system shelf including alignment features 公开/授权日:2024-07-02
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