- 专利标题： Systems and Methods for Purifying Solvents
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申请号： US17213325申请日： 2021-03-26
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公开(公告)号： US20210300850A1公开(公告)日： 2021-09-30
- 发明人: Eduardo Ramirez Romero , David Bollinger
- 申请人： Fujifilm Electronic Materials U.S.A., Inc.
- 申请人地址： US RI N. Kingstown
- 专利权人： Fujifilm Electronic Materials U.S.A., Inc.
- 当前专利权人： Fujifilm Electronic Materials U.S.A., Inc.
- 当前专利权人地址： US RI N. Kingstown
- 主分类号： C07C29/76
- IPC分类号： C07C29/76 ; B01D15/08 ; B01D71/36 ; B01D71/26
摘要：
The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process.
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