- 专利标题: INSPECTION WHEN TRANSFERRING ELECTRONIC COMPONENTS FROM A FIRST SUBSTRATE TO A SECOND SUBSTRATE
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申请号: US17264106申请日: 2019-08-23
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公开(公告)号: US20210313206A1公开(公告)日: 2021-10-07
- 发明人: Konrad Schmid , Uladimir Prakapenka
- 申请人: Muehlbauer GmbH & Co. KG
- 申请人地址: DE RODING
- 专利权人: Muehlbauer GmbH & Co. KG
- 当前专利权人: Muehlbauer GmbH & Co. KG
- 当前专利权人地址: DE RODING
- 优先权: DE102018006760.3 20180827
- 国际申请: PCT/EP2019/072577 WO 20190823
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/68
摘要:
The invention relates to an inspection unit intended for use in devices for transferring electronic components from a first substrate to a second substrate and/or for applying adhesive from a reservoir to the second substrate, comprising an image capturing unit, which is assigned an illumination unit, wherein the illumination unit is designed to direct light of different wavelengths onto a second holder, which in turn is designed to support an object located on the second substrate, which is to be captured by the image capturing unit, wherein a sixteenth, seventeenth, eighteenth and/or nineteenth conveying unit is designed to convey the respective image capturing unit and/or its associated optics, including focusing optics, a beam deflector and/or an illumination unit, along the second holder.
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