发明申请
- 专利标题: SENSOR SYSTEM, INCLUDING A PLURALITY OF INDIVIDUAL AND SEPARATE SENSOR ELEMENTS
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申请号: US17221362申请日: 2021-04-02
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公开(公告)号: US20210325422A1公开(公告)日: 2021-10-21
- 发明人: Amin Jemili , Joerg Braeuer , Johannes Classen
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102020204773.1 20200415
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; G01P15/03
摘要:
A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.
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