SENSOR SYSTEM, INCLUDING A PLURALITY OF INDIVIDUAL AND SEPARATE SENSOR ELEMENTS
摘要:
A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.
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