- 专利标题: LIGHT-SENSING APPARATUS AND LIGHT-SENSING METHOD THEREOF
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申请号: US17404812申请日: 2021-08-17
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公开(公告)号: US20210373168A1公开(公告)日: 2021-12-02
- 发明人: Szu-Lin Cheng , Chien-Yu Chen , Shu-Lu Chen , Yun-Chung Na , Ming-Jay Yang , Han-Din Liu , Che-Fu Liang , Jung-Chin Chiang , Yen-Cheng Lu , Yen-Ju Lin
- 申请人: Artilux, Inc.
- 申请人地址: US CA Menlo Park
- 专利权人: Artilux, Inc.
- 当前专利权人: Artilux, Inc.
- 当前专利权人地址: US CA Menlo Park
- 主分类号: G01S17/894
- IPC分类号: G01S17/894 ; G01S17/26 ; H01L27/148 ; G01S7/481
摘要:
A photo-detecting apparatus is provided. The photo-detecting apparatus includes: a substrate made by a first material or a first material-composite; an absorption layer made by a second material or a second material-composite, the absorption layer being supported by the substrate and the absorption layer including: a first surface; a second surface arranged between the first surface and the substrate; and a channel region having a dopant profile with a peak dopant concentration equal to or more than 1×1015 cm−3, wherein a distance between the first surface and a location of the channel region having the peak dopant concentration is less than a distance between the second surface and the location of the channel region having the peak dopant concentration, and wherein the distance between the first surface and the location of the channel region having the peak dopant concentration is not less than 30 nm.
公开/授权文献
- US11630212B2 Light-sensing apparatus and light-sensing method thereof 公开/授权日:2023-04-18
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