- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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申请号: US17111466申请日: 2020-12-03
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公开(公告)号: US20210391430A1公开(公告)日: 2021-12-16
- 发明人: Georgios Vellianitis
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/417
- IPC分类号: H01L29/417 ; H01L29/423 ; H01L29/40
摘要:
A semiconductor device and a manufacturing method thereof are provided. The gate structure and the source and drain terminals are located in the insulating dielectric layer, and the source and drain terminals are located respectively at both opposite ends of the gate structure. The channel region is sandwiched between the gate structure and the source and drain terminals and surrounds the gate structure. The channel region extends between the source and drain terminals.
公开/授权文献
- US11411089B2 Semiconductor device and manufacturing method thereof 公开/授权日:2022-08-09
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